Electrostatic collection of debris resulting from 193 nm laser etching of polyimide

Ablated debris produced by 193 nm laser irradiation of polyimide can be preferentially collected on charged wire or plate electrodes placed on the polymer surface. Scanning micrographs indicate several types of debris structure depending on laser fluence and applied potential. The fragment morphology and possible charging mechanisms are discussed. The collected debris is believed to consist of pure carbon.