Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We have studied the formation of monolayer films of lithium, sodium, potassium and cesium atoms on Cu(111) at room temperature with angle-resolved inverse and direct photoemission, and monitored the coverage-dependent changes of the empty and occupied electronic density of states of the alkali adsorbates. All alkali metals formed 2 × 2 overlayer structures with characteristic two-dimensional electronic band structures. © 1993.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Q.R. Huang, Ho-Cheol Kim, et al.
Macromolecules