J.H. Stathis, R. Bolam, et al.
INFOS 2005
No abstract available.
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999