Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We present the results of the calculations of some electronic properties of semiconductor quantum wells and superlattices. The review includes the superlattice band structure and the quantum well bound energy levels; the virtual bound states of semiconductor quantum wells and their influence on the energy spectrum of separate confinement heterostructures. Finally the perturbation of quantum well bound states and exciton states by a static electric field applied parallel to the growth axis is considered. © 1985.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Lawrence Suchow, Norman R. Stemple
JES