Electron diffraction from areas less than 3 nm in diameter

A method of obtaining rocking-beam microarea electron diffraction patterns is described employing the electron optics of a single-field condenser-objective lens in a commercial scanning transmission electron microscope. Theoretical and experimental evidence is presented showing that it is possible to obtain diffraction patterns from areas less than 3 nm in diameter with minimum lattice spacings of 0.14 nm. This is demonstrated with a specimen consisting of small gold particles evaporated on a carbon substrate.