J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Polyperfluorinated propylene oxides, -(CF(CF3)-CF2O-)n-, where n = 4, 8 and 50, are exposed to electron beams and their subsequent degradation monitored via infrared spectroscopy at T = 11 and 298 K. COF2, CF4, and R-CFO are produced and their G values are reported as a function of n, the number of monomer units, in the polymer. The G values range from 0.1 to 3, depending upon the gas product and n. The efficiency for gas evolution decreases with increasing number of monomer units. For n = 4, R-CFO, CF4 and COF2 are produced with G values of 3.0, 2.7, and 2.4, respectively. As n increases to 50, COF2 becomes the dominant product with a G value of 1.0, followed by CF4 at 0.7, and R-CFO at 0.1.
J.K. Gimzewski, T.A. Jung, et al.
Surface Science
Mark W. Dowley
Solid State Communications
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.H. Stathis, R. Bolam, et al.
INFOS 2005