A. Hartstein, R.H. Koch
Physical Review B
A model is constructed where a nonequilibrium vacancy concentration resulting from electromigration-induced mass flux divergences is responsible for damage in the form of wedge-like and/or crack-like voids as well as thinning of extended areas. The damage morphology is primarily a function of temperature.
A. Hartstein, R.H. Koch
Physical Review B
J.R. Kirtley, R.M. Feenstra, et al.
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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IRPS 2008
J.Z. Sun, T.S. Kuan, et al.
SPIE IOPTO 2004