Conference paper
Tailoring dielectric materials for robust BEOL reliability
G. Bonilla, T.M. Shaw, et al.
IRPS 2012
It has been demonstrated that, in those instances where electromigration-induced mass transport is dominated by interfacial diffusion, the adhesion at the interface where mass transport is primarily taking place is related to the electromigration flux. Furthermore, it is shown that the cohesive energy of the interface is directly related to the activation energy for diffusion. © 2005 IEEE.
G. Bonilla, T.M. Shaw, et al.
IRPS 2012
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