Reactive ion etching processes for amorphous germanium alloys
Y. Kuo
MRS Fall Meeting 1993
We present results of electrical transport studies performed on thin films of ε1-Cu3Ge in the temperature range 4.2 - 300 K. It is found that ε1-Cu3Ge which has a long-range ordered monoclinic crystal structure, exhibits a remarkably low metallic resistivity of approx. 6 μΩ cm at room temperature. The density of charge carriers, which are predominantly holes, is approx. 8 × 1022/cm3 and is independent of temperature and film thickness. The Hall mobility at 4.2 K is approx. 132 cm2/V s, considerably higher than in pure copper. The elastic mean free path is found to be approx. 1200angstrom, which is surprisingly large for a metallic compound film. The results show that the residual resistivity is dominated by surface scattering rather than grain-boundary scattering. It is also found that by varying the Ge concentration from 0 to 40 at.% the resistivity exhibits anomalous behavior. This behavior is correlated with changes observed in the crystal structure of the thin-film alloys as the Ge concentration is increased. The resistivity remains close to that of the ε1-Cu3Ge phase over a range of Ge concentration which extends from 25 to 35 at.%.
Y. Kuo
MRS Fall Meeting 1993
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
D.B. Laks, D. Maroudas, et al.
MRS Fall Meeting 1993
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings