Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
We consider a model of non-interacting two-way traffic for the design of a sequence of two consecutive traffic lights. In order to calculate the optimal offset we maximize the probability of traversing the system without stopping and assume a given travel time distribution. The results are compared to the current engineering design. © 1966.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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