R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Thiol-ene photopolymers were studied as patternable resins for nanocontact molding imprint lithography. Photopolymerizable thiol and ene monomer mixtures were used, and after molding, patterned thiol-ene polymer features the size and shape of the original molds were replicated. Adhesion and release were examined and controlled by manipulating the surface chemistry of the substrate and mold. A direct correlation between cured thiol-ene polymer modulus and pattern fidelity was observed. © 2007 American Chemical Society.
R.J. Gambino, N.R. Stemple, et al.
Journal of Physics and Chemistry of Solids
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Shiyi Chen, Daniel Martínez, et al.
Physics of Fluids