R.S. Shenoy, K. Gopalakrishnan, et al.
VLSI Technology 2006
The initial dissociative chemisorption probability of N2 on Fe(111) is found to increase by a factor of 105 with increasing kinetic energy, rising from 1×10-6 at 0.09 eV to over 1×10-1 at 4.3 eV. This probability also increases with decreasing surface temperature, suggesting that reagent energy provides access to an intermediate state, such as ±-N2, whose population also increases with kinetic energy, consistent with the accepted mechanism at low energies. © 1987 The American Physical Society.
R.S. Shenoy, K. Gopalakrishnan, et al.
VLSI Technology 2006
C.T. Rettner, H.A. Michelsen, et al.
Journal of Electron Spectroscopy and Related Phenomena
G.M. Wallraff, D. Medeiros, et al.
Microlithography 2005
M. Albrecht, C.T. Rettner, et al.
NAPMRC 2003