Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Paper
Effect of misalignment on a circular, externally pressurized, gas-lubricated bearing
Abstract
No abstract available.
Related
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery