Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Small-angle X-ray scattering has been used to measure the deformation of craze fibrils during mechanical fatigue of polystyrene. The maximum deformation of the sample in the fatigue cycle was kept constant while the minimum deformation was varied. When the minimum deformation was 50% or more of the maximum, the load on the craze fibrils remained tensile. When the minimum deformation was reduced below this, the load on the fibrils became compressive and they buckled. The main effect of minimum sample deformation on fatigue life occurred in the regime where the fibrils remained straight. In this regime a decrease in minimum sample deformation caused a considerable decrease in fatigue life. At low minimum sample deformations the effects of minimum deformation on fatigue life were not large. These effects probably stem from the fibril strains involved in the deformation processes. © 1988 Chapman and Hall Ltd.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010