W. Zapka, A.C. Tam, et al.
Microelectronic Engineering
The phase angle of a gas-coupled photoacoustic (PA) signal has been measured as a function of coupling gas column thickness lg for a]] one-dimensional" PA cell. The PA signal is excited by a modulated continuous laser beam incident on an opaque solid surface of silicon. We show that the observed data can be explained in a PA model including the consideration of a residual volume in the PA cell, together with the consideration of viscous damping of the PA signal at small lg.
W. Zapka, A.C. Tam, et al.
Microelectronic Engineering
H. Sontag, A.C. Tam
Canadian journal of physics
D.J. Krajnovich, I.K. Pour, et al.
LEOS 1993
P. Korpiun, B. Büchner, et al.
Journal of Applied Physics