William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Low temperature diffusion of Cr and Si through thin gold films is studied in N2 and in (N2 + CO) ambients. The out-diffusion of both Cr and Si to the gold surface is suppressed in the presence of CO. The results are discussed in terms of a model which considers the roles of both the gold film and the ambients used. © 1980, The Electrochemical Society, Inc. All rights reserved.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures
P.C. Pattnaik, D.M. Newns
Physical Review B
J.Z. Sun
Journal of Applied Physics