Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Bowen Zhou, Bing Xiang, et al.
SSST 2008
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory
Nanda Kambhatla
ACL 2004