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Photomask and Next-Generation Lithography Mask Technology 2004
A method is described using screw coordinates for the dynamical analysis of systems of pair-connected rigid bodies, such as plane and three-dimensional mechanisms, including gyroscopes. The use of screw coordinates leads to general, linear, and computationally efficient numerical procedures, which are illustrated by a dynamic analysis of a constrained spatial RSKR (or R4S) linkage. © 1971 ASME.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
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MMSP 2007
Israel Cidon, Leonidas Georgiadis, et al.
IEEE/ACM Transactions on Networking
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SC 2012