Isotropic treatment of EMF effects in advanced photomasks
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
The drift-diffusion equations of semiconductor physics, allowing for field-dependent drift velocities, are analysed by the method of matched asymptotic expansions for one-dimensional PN and PNPN forward-biased structures. The analysis is relevant to describing the structure of the solutions to the drift-diffusion equations for large electric fields when drift velocity saturation effects become significant. In this high-field limit, the boundary layer structure for the solutions to the drift-diffusion equations is seen to differ substantially from that near equilibrium. In particular, boundary layers for the carrier concentrations can occur near the contacts. The asymptotic solutions and the current-voltage relations, constructed in the high-field limit, are found to agree well with direct numerical solutions to the drift-diffusion equations. © 1992 Oxford University Press.
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Richard M. Karp, Raymond E. Miller
Journal of Computer and System Sciences
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991