Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
It has long been postulated that gas-surface chemical reactions can occur by means of two distinct mechanisms: direct reaction on a single gas-surface encounter or reaction between two adsorbed species. It is shown here that these mechanisms have distinct dynamical signatures, as illustrated by the reaction of hydrogen with chlorine on gold(111). The direct reaction product leaves the surface with a high kinetic energy in a narrow angular distribution that displays a "memory" of the direction and energy of the incident hydrogen atom. The indirect reaction product has a near-thermal energy distribution and an angular distribution that is close to that of a cosine function.
Rohit S. Shenoy, Geoffrey W. Burr, et al.
Semiconductor Science and Technology
Manfred Albrecht, Srikanth Ganesan, et al.
IEEE Transactions on Magnetics
Gregory S. Doerk, Chi-Chun Liu, et al.
SPIE Advanced Lithography 2012
Donald S. Bethune, Charles T. Rettner
IEEE JQE