John G. Long, Peter C. Searson, et al.
JES
Progress in the state-of-the-art of the fabrication of discrete and planar monolithic structures in III-V semiconductor compounds and alloys will be presented. Devices made by diffusion and grown-diffusion techniques on Ga1-xAlxAs, GaAs1-xPx, and GaP will be discussed with emphasis on planar device structures. In addition, a comparison of the contacts from various metallurgies used on these materials will be discussed. © 1973.
John G. Long, Peter C. Searson, et al.
JES
Revanth Kodoru, Atanu Saha, et al.
arXiv
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
J.Z. Sun
Journal of Applied Physics