Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
A general methodology for direct thermal patterning of self-assembled nanoparticle films is presented. Specifically, using laser heating we have fabricated ferromagnetic FePt nanoparticle array patterns with 0.8 μm pitch and an edge resolution of ∼100 nm. The nanoparticle arrays have been investigated by scanning SQUID microscopy and MFM. Finally, we have measured the patterning rate as a function of temperature by monitoring the change in optical reflectance.
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008