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Modeling polarization for Hyper-NA lithography tools and masks
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SPIE Advanced Lithography 2007
Using the Monte-Carlo technique we studied the isotropic layered xy-model. We concentrate on the fall of the transition temperature Tc, the behavior of the specific heat and the vortex density with reduced thickness. Our approximate Ginzburg-Landau treatment suggests that the drop of Tc resulting from the dimensional crossover is a combination of fluctuation and boundary effects. © 1992 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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