M. Hargrove, S.W. Crowder, et al.
IEDM 1998
We observe clearly resolved diffraction peaks in the scattering of argon from a 2H-W(100) surface, demonstrating the importance of quantum effects even for relatively heavy atoms. The argon diffraction peak intensities decrease exponentially with substrate temperature in a manner consistent with a surface Debye temperature of ~ 400 K. For large incidence angles, (e.g. θi = 60°), angular distributions are observed to consist of a single quasi-specular lobe which narrows substantially with incidence energy. In contrast, for θi = 30°, a rainbow distribution is found with the angular separation of the two lobes decreasing with increasing energy. These observations are discussed in terms of classical and quantum models of gas-surface scattering. © 1991.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
J. Tersoff
Applied Surface Science
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999