Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Initial value problems for weakly nonlinear systems of differential equations are studied here. A perturbation result is obtained which is shown to give a valid approximation to the solution. The approximation is determined by solving two associated problems, and it is especially derived for problems which have rapidly oscillating and rapidly decaying solutions. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Journal of Biomedical Informatics
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SCML 2024