Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The dielectric response function of SmS and SmAs has been determined via a Kramers-Kronig transformation of the room temperature reflectivity in the range from 10-2 eV to 22 eV. In SmS the assignment of optical transitions, including those from the (S) 3s core level, has been corroborated by the corresponding ones of SmAs. Reductions of the 4f binding energy are revealed in optical f→d transitions as compared to x-ray photoemission data. © 1983.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thomas E. Karis, C. Mark Seymour, et al.
Rheologica Acta
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
C.M. Brown, L. Cristofolini, et al.
Chemistry of Materials