William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The position of the Fermi level EF relative to the valence-band maximum EV has been determined from accurate measurements of the Si 2p core-level position relative to EF. As a reference, we use p-doped samples with a Ga overlayer and n-doped samples with a Cs + O overlayer where EF is pinned near the valence-band maximum and conduction-band minimum, respectively. We obtain EF-EV=0.40 0.03 eV for low-step-density cleaved Si(111)-(2×1) and EF-EV=0.63 0.05 eV for annealed Si(111)-(7×7). Stepped cleavage surfaces are characterized by EF-EV=0.46 eV and exhibit larger surface core-level shifts and a shift of the dangling-bond states towards lower binding energy. © 1983 The American Physical Society.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
P. Alnot, D.J. Auerbach, et al.
Surface Science
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Physica E: Low-Dimensional Systems and Nanostructures
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Physical Review B