Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Paper
Determination of surface structures using he-diffraction
Abstract
The use of He-diffraction as a method in surface crystallography is briefly reviewed. To illustrate the possibilities and limitations a few examples of surface structures are presented and discussed. Current problems and future needs are outlined. © 1982 IOP Publishing Ltd.
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