Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Model experiments have been used to study the cross-linking reactions that are operative in a new negative-tone resist system based on photoacid-catalyzed electrophilic aromatic substitution of copolymers containing benzyl acetate pendant groups. NMR monitoring of the formation of diphenylmethane units in the acid-catalyzed reaction of various benzyl acetates with themselves and with activated aromatic compounds such as 4-isopropylphenol gave insight into the cross-linking reaction. The influence of the leaving group, stabilizing substituents, and nucleophile on the overall process and the possible formation of O-alkylated products or intermediates were studied. © 1991, American Chemical Society. All rights reserved.
Shu-Jen Han, Dharmendar Reddy, et al.
ACS Nano
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Frank Stem
C R C Critical Reviews in Solid State Sciences