Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
As miniature SQUID susceptometers and scanning SQUID microscopes come into wider use, it is important to understand in detail the magnetic coupling of objects of interest to small superconducting pickup loops as well as our ability to scale such pickup loop structures to sub-µm dimensions. In this paper we address important aspects of both of these issues. First, assuming a perfect circular pickup loop, we examine the coupling to three-dimensional objects and arrive at a number of simple practical results for measurements on small samples with various geometries and positions. Second, we examine the nature of small superconducting pickup loop structures and the impact on scaling of factors such as connecting leads, local groundplanes and the superconducting penetration depth. We conclude that highly localized pickup areas of well under 1µm2are possible with existing technology. © 1995 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
David B. Mitzi
Journal of Materials Chemistry
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Revanth Kodoru, Atanu Saha, et al.
arXiv