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Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
P.C. Pattnaik, D.M. Newns
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M. Hargrove, S.W. Crowder, et al.
IEDM 1998