Conference paper
EPI active devices
G.L. Patton, B.S. Meyerson, et al.
Silicon Materials Science and Technology 1990
No abstract available.
G.L. Patton, B.S. Meyerson, et al.
Silicon Materials Science and Technology 1990
F.K. LeGoues, J. Tersoff, et al.
Physical Review Letters
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
J.W. Bartha, P.O. Hahrt, et al.
JVSTA