A. Rastelli, M. Stoffel, et al.
Microelectronics Journal
We show that in epitaxial growth, there is a critical island size Rc at which a second layer nucleates on top of the island. This provides a simple perspective on the conditions for smooth versus rough growth: For island spacing Ln, if Rc<Ln the islands will nucleate a second layer before coalescence, giving multilayer growth. This occurs when there is a sufficiently large diffusion barrier (the "Schwoebel barrier") at the island edge. We demonstrate that surfactants can enforce layer-by-layer growth by reducing the island spacing. The dependence upon temperature is also explained. © 1994 The American Physical Society.
A. Rastelli, M. Stoffel, et al.
Microelectronics Journal
J. Schneir, R. Sonnenfeld, et al.
Physical Review B
F.M. Ross, P.A. Bennett, et al.
Micron
J. Tersoff
Applied Physics Letters