Creating and observing surface features with a scanning tunneling microscope.

Scanning Tunneling Microscopy (STM) can be used to perform lithography on a surface and to image the results of lithography performed using other techniques. We have imaged a 1 nm structure created with the STM on graphite, a 300 nm structure electrodeposited with the STM on gold, and a gold diffraction grating created using a diamond scribe. In addition we present atomic resolution images of graphite showing a surface reconstruction. © 1988 SPIE.