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Modeling polarization for Hyper-NA lithography tools and masks
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The correlation energy of the anyon gas is expressed in terms of a coupling-constant integral involving two-body and three-body correlation functions. In the random-phase approximation, the dominant two-body contributions involve the energy difference between the collective modes of the interacting and noninteracting systems, which is evaluated numerically for the Bose gas and for semions. © 1993 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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