E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
No abstract available.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
John G. Long, Peter C. Searson, et al.
JES