Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The controlled crystallization of amorphous second phases in SiAlON is demonstrated in two systems. In a magnesia‐containing SiAlON, cordierite crystallized on annealing after hot‐pressing. Similarly, garnet crystallized in yttria‐contain‐ing SiAlON. The resulting microstructures are characterized by TEM and qualitatively related to changes on room‐temperature toughness and high‐temperature deformation. Copyright © 1987, Wiley Blackwell. All rights reserved
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SPIE AeroSense 1997
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JES
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Physics of Fluids