Hiroshi Ito, Reinhold Schwalm
JES
The controlled crystallization of amorphous second phases in SiAlON is demonstrated in two systems. In a magnesia‐containing SiAlON, cordierite crystallized on annealing after hot‐pressing. Similarly, garnet crystallized in yttria‐contain‐ing SiAlON. The resulting microstructures are characterized by TEM and qualitatively related to changes on room‐temperature toughness and high‐temperature deformation. Copyright © 1987, Wiley Blackwell. All rights reserved
Hiroshi Ito, Reinhold Schwalm
JES
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.Z. Sun
Journal of Applied Physics
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Technical Digest-International Electron Devices Meeting