T. Schneider, E. Stoll
Physical Review B
No abstract available.
T. Schneider, E. Stoll
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
John G. Long, Peter C. Searson, et al.
JES
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009