Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
A set of facilities for an algebra system that makes it possible to mampulate formal power series is described. Unlike many previous power series packages, the one presented here does not enforce any predetermined or arbitrary limits on the order of expansions generated. The system can deal with the elementary functions and copes gracefully with removable singularities of the form exemplified by t/sin(t) at t = 0. Examples of the use of the power series package are given; they were run on the SCRATCHPAD algebra system. © 1975, ACM. All rights reserved.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Satoshi Hada
IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences
Imran Nasim, Melanie Weber
SCML 2024
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Ann. Math. Artif. Intell.