Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The structure of self-assembled monolayers of a long-chain perfluoro mercaptan has been investigated using molecular dynamics simulations. The particular system investigated, namely perfluorooctyl mercaptoethylamide, † has been chosen because it offers the possibility of generating a Teflon-like coating on top of a polar film consisting of hydrogen-bonded peptide groups. We find that the monolayer consists of close-packed perfluoro alkanes standing more or less upright and of hydrogen-bonded chains of peptide groups. The intramolecular flexibility of the molecule enables it to form hydrogen bonds with the peptide oxygen and nitrogen separated by ca. 2.8 Å and to accommodate simultaneously the 5.8 Å spacing of the tails. From our molecular dynamics simulations we have also determined the spectrum of the motion of the polarization associated with the peptide groups.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
R. Ghez, J.S. Lew
Journal of Crystal Growth
P. Martensson, R.M. Feenstra
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films