Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
No abstract available.
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films