E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
The numerical method of Shugard, Weeks, and Gilmer is shown to contain systematic errors that prevent it from testing theories of planar and roughening models. © 1982 The American Physical Society.
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
O.F. Schirmer, K.W. Blazey, et al.
Physical Review B
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
T.N. Morgan
Semiconductor Science and Technology