Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
In spite of the excess enthalpy of amorphism, neither the normal thermal melting point of Si nor the threshold absorbed energy density for pulsed electron and pulsed laser beam annealing of Si and GaAs is significantly dependent on whether the sample is initially amorphous or crystalline. However, the duration of the period of high optical reflectivity and the magnitude of atomic diffusion during the annealing event are much enhanced near threshold if the sample is initially amorphous. Here these facts are explained in terms of conventional theory of covalent bonding and of the normal thermal melting process and in terms of the "Plasma Annealing" theory of pulsed beam annealing. © 1982.
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Frank R. Libsch, Takatoshi Tsujimura
Active Matrix Liquid Crystal Displays Technology and Applications 1997
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
Lawrence Suchow, Norman R. Stemple
JES