Sankar Basu
Journal of the Franklin Institute
No abstract available.
Sankar Basu
Journal of the Franklin Institute
Shu Tezuka
WSC 1991
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007