Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In this paper we classify all the minimal bilinear algorithms for computing the coefficients of (Σn-1i=0 xiui) (Σn-1i=0 yiui) mod Q(u)l where deg Q(u)=j, jl=n and Q(u) is irreducible (over G) is studied. The case where l = 1 was studied in [8]. For l > 1 the main results are that we have to distinguish between two cases: j > 1 and j = 1. The case where j > 1 was studied in [1]. For j = 1 it is shown that up to equivalence, every minimal (2n - 1 multiplications) bilinear algorithm for computing the coefficients of (Σn-1i=0 xiui) (Σn-1i=0 yiui) mod un is done either by first computing the coefficients of (Σn-1i=0 xiui) (Σn-1i=0 yiui) and then reducing them modulo un or by first computing the coefficients (Σn-2i=0 xiui) (Σn-1i=0 yiui) and then reducing them modulo un and adding xn-1y0un-1 or by first computing the coefficients (Σn-2i=0 xiui) (Σn-2i=0 yiui) and then reducing them modulo un and adding (xn-1y0 + x0yn-1)un-1. © 1991.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Ziyang Liu, Sivaramakrishnan Natarajan, et al.
VLDB
Reena Elangovan, Shubham Jain, et al.
ACM TODAES
Raymond Wu, Jie Lu
ITA Conference 2007