Thomas M. Cheng
IT Professional
The chemical amplification concept was invented at IBM Research and quickly brought into use in the production of dynamic random access memory devices in the company. It has remained as an important foundation for the design of advanced resist systems for use in short-wavelength (<300-nm) lithographic technologies.
Thomas M. Cheng
IT Professional
Alessandro Morari, Roberto Gioiosa, et al.
IPDPS 2011
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering