Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Many numerical methods call for repeated calculation of the first partial derivatives of a given function of several variables. Errors m a program for that calculation can be hard to discover. A procedure IS offered for testing the program and locating its errors. © 1982, ACM. All rights reserved.
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
Andrew Skumanich
SPIE Optics Quebec 1993
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991