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Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
Paper
Checking the Calculation of Gradients
Abstract
Many numerical methods call for repeated calculation of the first partial derivatives of a given function of several variables. Errors m a program for that calculation can be hard to discover. A procedure IS offered for testing the program and locating its errors. © 1982, ACM. All rights reserved.
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