Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
When a map has one positive Lyapunov exponent, its attractors often look like multidimensional, Cantorial plates of spaghetti. What saves the situation is that there is a deterministic jumping from strand to strand. We propose to approximate such attractors as finite sets of K suitably prescribed curves, each parametrized by an interval. The action of the map on each attractor is then approximated by a map that takes a set of curves into itself, and we graph it on a KxK checkerboard as a discontinuous one-dimensional map that captures the quantitative dynamics of the original system when K is sufficiently large. © 1995 American Institute of Physics.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
David L. Shealy, John A. Hoffnagle
SPIE Optical Engineering + Applications 2007
Peter Wendt
Electronic Imaging: Advanced Devices and Systems 1990
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009