S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
Ceramics, both crystalline and amorphous, as used today for such applications as processing, tranferring, storing, printing and displaying information are reviewed. State of the art in materials and processes as well as challenges that need to be met to support the growth of the industry are discussed. © 1987.
S. Cohen, J.C. Liu, et al.
MRS Spring Meeting 1999
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Molecular Physics
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SPIE Advanced Lithography 2008