Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Paper
Catalyzed Crystallization in SiO2 Thin Films
Abstract
No abstract available.
Related
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
G. Will, N. Masciocchi, et al.
Zeitschrift fur Kristallographie - New Crystal Structures
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter